Comparative evaluation of three image analysis methods for angular displacement measurement in a MEMS microgripper prototype: a preliminary study

<p class="Abstract"><span lang="EN-US">The functional characterization of MEMS devices is relevant today since it aims at verifying the behavior these devices, as well improving their design. In this regard, study focused on a microgripper prototype suitable in biomedical applications: measurement angular displacement comb-drive carried out by means two novel automatic procedures, based an image analysis method, SURF-based (Angular Displacement Measurement Speeded Up Robust Features, ADM<sub>SURF</sub>) and FFT-based Fast Fourier Transform, ADM<sub>FFT</sub>) respectively. Moreover, results are compared with Semi-Automatic Method (SAM), to evaluate which them most for device. The curve fitting outcomes from SAM ADM<sub>SURF</sub>, showed quadratic trend agreement analytical model. ADM<sub>SURF</sub> measurements below 1° affected uncertainty about 0.08° voltages less than 14 V, confirming its suitability characterization. It was also evaluated that ADM<sub>FFT</sub> more rotations greater (up 30°), 0.02°, 95% confidence level.</span></p>